1 research outputs found
High-Performance Flexible Single-Crystalline Silicon Nanomembrane Thin-Film Transistors with High‑<i>k</i> Nb<sub>2</sub>O<sub>5</sub>–Bi<sub>2</sub>O<sub>3</sub>–MgO Ceramics as Gate Dielectric on a Plastic Substrate
A novel
method of fabricating flexible thin-film transistor based on single-crystalline
Si nanomembrane (SiNM) with high-<i>k</i> Nb<sub>2</sub>O<sub>5</sub>–Bi<sub>2</sub>O<sub>3</sub>–MgO (BMN)
ceramic gate dielectric on a plastic substrate is demonstrated in
this paper. SiNMs are successfully transferred to a flexible polyethylene
terephthalate substrate, which has been plated with indium-tin-oxide
(ITO) conductive layer and high-<i>k</i> BMN ceramic gate
dielectric layer by room-temperature magnetron sputtering. The BMN
ceramic gate dielectric layer demonstrates as high as ∼109
dielectric constant, with only dozens of pA current leakage. The Si–BMN–ITO
heterostructure has only ∼nA leakage current at the applied
voltage of 3 V. The transistor is shown to work at a high current
on/off ratio of above 10<sup>4</sup>, and the threshold voltage is
∼1.3 V, with over 200 cm<sup>2</sup>/(V s) effective channel
electron mobility. Bending tests have been conducted and show that
the flexible transistors have good tolerance on mechanical bending
strains. These characteristics indicate that the flexible single-crystalline
SiNM transistors with BMN ceramics as gate dielectric have great potential
for applications in high-performance integrated flexible circuit